[G-8-4] High Performance SiN-MIM Decoupling Capacitors with Surface-smoothed Bottom Electrodes for High-speed MPUs

Ippei Kume, Naoya Inoue, Hiroto Ohtake, Shinobu Saitoh, Naoya Furutake, Jun. Kawahara, Takeshi Toda, Toshiki Shinmura, Koujirou Matsui, Takayuki Iwaki, Koichi Ohto, Masayuki Furumiya, Yoshihiro Hayashi (1.System Devices Research Laboratories, NEC, 2.NEC Electronics)

https://doi.org/10.7567/SSDM.2006.G-8-4