[G-8-4] High Performance SiN-MIM Decoupling Capacitors with Surface-smoothed Bottom Electrodes for High-speed MPUs

Ippei Kume、Naoya Inoue、Hiroto Ohtake、Shinobu Saitoh、Naoya Furutake、Jun. Kawahara、Takeshi Toda、Toshiki Shinmura、Koujirou Matsui、Takayuki Iwaki、Koichi Ohto、Masayuki Furumiya、Yoshihiro Hayashi (1.System Devices Research Laboratories, NEC、2.NEC Electronics)

https://doi.org/10.7567/SSDM.2006.G-8-4