[H-1-4] Sub-30 nm Strained P-Channel FinFETs with Condensed SiGe Source/Drain Stressors

Kian-Ming Tan, Tsung-Yang Liow, Rinus T. P. Lee, King-Jien Chui, Chih-Hang Tung, N. Balasubramanian, Ganesh S. Samudra, Won-Jong Yoo, Yee-Chia Yeo (1.Silicon Nano Device Lab., Dept of Electrical and Computer Engineering, National University of Singapore, 2.Institute of Microelectronics)

https://doi.org/10.7567/SSDM.2006.H-1-4