[H-10-4] Novel Gate-All-Around MOSFETs with Self-Aligned Structure

Jae Young Song, Woo Young Choi, Jong Pil Kim, Sang Wan Kim, Jong Duk Lee, Byung-Gook Park (1.Inter-University Semiconductor Research Center and School of Electrical Engineering, Seoul National University)

https://doi.org/10.7567/SSDM.2006.H-10-4