The Japan Society of Applied Physics

[H-2-1] Potential of and Issues with Multiple-Stressor Technology (MST) in High-Performance 45nm Generation Devices

T. Miyashita, A. Hatada, Y. Shimamune, T. Owada, N. Tamura, T. Aoyama, S. Satoh (1.Fujitsu Laboratories Ltd., 2.Fujitsu Limited.)

https://doi.org/10.7567/SSDM.2006.H-2-1