[H-8-1] Strained SiGe-On-Insulator N-MOSFET with Silicon Source/Drain for Drive Current Enhancement

Grace Huiqi Wang, Eng-Huat Toh, Kah-Wee Ang, Chih-Hang Tung, Anyan Du, Yong-Lim Foo, Guo-Qiang Lo, Ganesh Samudra, Yee-Chia Yeo (1.Silicon Nano Device Lab., Dept. of Electrical and Computer Engineering, National University of Singapore, 2.Institute of Microelectronics, 3.Institute of Materials Research & Engineering)

https://doi.org/10.7567/SSDM.2006.H-8-1