[H-8-1] Strained SiGe-On-Insulator N-MOSFET with Silicon Source/Drain for Drive Current Enhancement

Grace Huiqi Wang、Eng-Huat Toh、Kah-Wee Ang、Chih-Hang Tung、Anyan Du、Yong-Lim Foo、Guo-Qiang Lo、Ganesh Samudra、Yee-Chia Yeo (1.Silicon Nano Device Lab., Dept. of Electrical and Computer Engineering, National University of Singapore、2.Institute of Microelectronics、3.Institute of Materials Research & Engineering)

https://doi.org/10.7567/SSDM.2006.H-8-1