Quantitative Evaluation of Interface Trap Density in Ge-MIS Interfaces

Noriyuki Taoka; Keiji Ikeda; Yoshimi Yamashita; Naoharu Sugiyama; Shin-ichi Takagi

doi:https://doi.org/10.7567/SSDM.2006.J-6-1

2006 International Conference on Solid State Devices and Materials

2006年9月12日〜 2006年9月15日
PACIFICO Yokohama, Yokohama, Japan

[J-6-1] Quantitative Evaluation of Interface Trap Density in Ge-MIS Interfaces

Noriyuki Taoka、Keiji Ikeda、Yoshimi Yamashita、Naoharu Sugiyama、Shin-ichi Takagi (1.MIRAI-ASRC, AIST Tsukuba West 7、2.MIRAI-ASET, AIST Tsukuba West 7、3.The University of Tokyo)

https://doi.org/10.7567/SSDM.2006.J-6-1

▲