[J-7-2] Current Transportation Mechanism and Interface States Characterization of Sputtered Gd2O3 Gate Dielectrics for ULSI Application

Woei Cherng Wu, Chao Sung Lai, Kuan Ti Wang, Jer Chyi Wang, Tien Sheng Chao (1.Department of Electronic Physics, National Chiao Tung University, 2.Department of Electronic Engineering, Chang Gung University, 3.Nanya Technology Corporation)

https://doi.org/10.7567/SSDM.2006.J-7-2