Compatibility of ALD Hafnium Silicate with Dual Metal Gate CMOS Integration

Muhammad Mustafa Hussain; Seung-Chul Song; Chang Yong Kang; Manuel Quevedo-Lopez; Husam Alshareef; Barry Sassman; Rino Choi; Byoung Hun Lee

doi:https://doi.org/10.7567/SSDM.2006.J-8-4

[J-8-4] Compatibility of ALD Hafnium Silicate with Dual Metal Gate CMOS Integration

Muhammad Mustafa Hussain, Seung-Chul Song, Chang Yong Kang, Manuel Quevedo-Lopez, Husam Alshareef, Barry Sassman, Rino Choi, Byoung Hun Lee (1.SEMATECH, 2.Texas Instruments Assignee, 3.IBM Assignee)

https://doi.org/10.7567/SSDM.2006.J-8-4

2006 International Conference on Solid State Devices and Materials

[J-8-4] Compatibility of ALD Hafnium Silicate with Dual Metal Gate CMOS Integration