[P-1-17] Work Function Modulation Using Thin Interdiffused Metal Layers for Dual Metal-Gate Technology

Andy Eu-Jin Lim、Wan-Sik Hwang、Xin-Peng Wang、Dim-Lee Kwong、Yee-Chia Yeo (1.Dept. of Electrical & Computer Engineering, National University of Singapore、2.Institute of Microelectronics)

https://doi.org/10.7567/SSDM.2006.P-1-17