[P-1-17] Work Function Modulation Using Thin Interdiffused Metal Layers for Dual Metal-Gate Technology

Andy Eu-Jin Lim, Wan-Sik Hwang, Xin-Peng Wang, Dim-Lee Kwong, Yee-Chia Yeo (1.Dept. of Electrical & Computer Engineering, National University of Singapore, 2.Institute of Microelectronics)

https://doi.org/10.7567/SSDM.2006.P-1-17