[P-1-21] Composition Dependence of Work Function in Metal (Ni, Pt)-Germanide Gate Electrodes

Daisuke Ikeno, Kouhei Furumai, Hiroki Kondo, Mitsuo Sakashita, Akira Sakai, Masaki Ogawa, Shigeaki Zaima (1.Nagoya University, Graduate School of Engineering, 2.Nagoya University, Center for Cooperative Research in Advanced Science & Technology)

https://doi.org/10.7567/SSDM.2006.P-1-21