[P-1-27] Low Leakage Current and Low Resistivity p+n Diodes on Si(110) Fabricated by Ga+/B+ Combination I/I and Low Temperature Annealing

Hiroshi Imai, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi (1.Graduate School of Engineering, Tohoku University, 2.New Industry Creation Hatchery Center, Tohoku University)

https://doi.org/10.7567/SSDM.2006.P-1-27