[P-10-18] Physical Properties and Fabricating Technology of Novel Type Resist for Color Filter in TFT LCD

P. C. Pan, H. C. Wu, H. S. Koo, T. Kawai (1.Nanoscience and Nanotechnology Center, The institute of Scientific Industrial Research, Osaka University)

https://doi.org/10.7567/SSDM.2006.P-10-18