[P-2-9] Ag diffusion in Low-K material (SiOC and BCN) and its challenges using as an interconnection

M. K. Mazumder、R. Moriyama、C. Kimura、H. Aoki、T. Sugino (1.Dept. of Electrical, Electronic and Information Engineering, Osaka University)

https://doi.org/10.7567/SSDM.2006.P-2-9