[P-3-11] Impact of Source/Drain Si1-yCy Stressors on the Silicon-on-Insulator NMOSFETs

Jacky Huang, W.-C. Wang, J. W. Fan, S. T. Chang (1.Department of Electrical Engineering, National Chung Hsing University)

https://doi.org/10.7567/SSDM.2006.P-3-11