[P-3-25] Ultra-Narrow Silicon Nanowire (～3 nm) Gate-All-Around MOSFETs

N. Singh, Y.F. Lim, S. C. Rustagi, L.K. Bera, A. Agarwal, G. Q. Lo, N. Balasubramanian, D.-L. Kwong (1.Institute of Microelectronics)

https://doi.org/10.7567/SSDM.2006.P-3-25