[P-3-25] Ultra-Narrow Silicon Nanowire (～3 nm) Gate-All-Around MOSFETs

N. Singh、Y.F. Lim、S. C. Rustagi、L.K. Bera、A. Agarwal、G. Q. Lo、N. Balasubramanian、D.-L. Kwong (1.Institute of Microelectronics)

https://doi.org/10.7567/SSDM.2006.P-3-25