The Japan Society of Applied Physics

[P-3-8] Efficient Improvement on Device Performance for sub-90nm CMOSFETs

Chien-Ting Lin, Yean-Kuen Fang, Chieh-Ming Lai, Wen-Kuan Yeh, Chia-Wei Hsu, Che-Hua Hsu, Liang-Wei Chen, Mike Ma (1.Institute of Microelectronics, National Cheng Kung University, Taiwan, 2.Department of Electrical Engineering, National University of Kaohsiung, Taiwan, 3.United Microelectronics Corporation, Central R&D Division)

https://doi.org/10.7567/SSDM.2006.P-3-8