The Japan Society of Applied Physics

[P-3-8] Efficient Improvement on Device Performance for sub-90nm CMOSFETs

Chien-Ting Lin、Yean-Kuen Fang、Chieh-Ming Lai、Wen-Kuan Yeh、Chia-Wei Hsu、Che-Hua Hsu、Liang-Wei Chen、Mike Ma (1.Institute of Microelectronics, National Cheng Kung University, Taiwan、2.Department of Electrical Engineering, National University of Kaohsiung, Taiwan、3.United Microelectronics Corporation, Central R&D Division)

https://doi.org/10.7567/SSDM.2006.P-3-8