[P-4-2] FinFET NAND Flash with Nitride/Si Nanocrystal/Nitride Hybrid Trap Layer

Jeong-Dong Choe, Se-Hoon Lee, Jong Jin Lee, Eun Suk Cho, Youngjoon Ahn, Byoung Yong Choi, Suk Kang Sung, Jintae No, Ilsub Chung, Kyucharn Park, Donggun Park (1.Device Research Team, PD Team, Semiconductor R&D Center, Samsung Electronics Co., 2.School of Information and Communication Engineering, Sungkyunkwan University)

https://doi.org/10.7567/SSDM.2006.P-4-2