[P-6-5] Pt Buried Gate E-pHEMT with High VG.ON and Reduced Surface Trap Effects

Kyoungchul Jang, Gyungseon Seol, Sungwon Kim, Jincherl Her, Jaehak Lee, Kwangseok Seo (1.Seoul National Univ., School Of Electrical Engineering and Computer Science, 2.Theleds Co., LTD.)

https://doi.org/10.7567/SSDM.2006.P-6-5