The Japan Society of Applied Physics

[P-6-5] Pt Buried Gate E-pHEMT with High VG.ON and Reduced Surface Trap Effects

Kyoungchul Jang、Gyungseon Seol、Sungwon Kim、Jincherl Her、Jaehak Lee、Kwangseok Seo (1.Seoul National Univ., School Of Electrical Engineering and Computer Science、2.Theleds Co., LTD.)

https://doi.org/10.7567/SSDM.2006.P-6-5