[A-1-1] Challenges for PMOS Metal Gate Electrodes and Solutions for Low Power Applications

J.K. Schaeffer, W.J. Taylor, S.B. Samavedam, D.C. Gilmer, D.H. Triyoso, R.I. Hegde, S. Kalpat, C. Capasso, M. Sadd, M. Stoker, A. Haggag, D. Roan, B.E. White Jr. (1.Silicon Technology Solutions, 2.Freescale Semiconductor)

https://doi.org/10.7567/SSDM.2007.A-1-1