[A-2-1] Evaluation of SiO2/GeO2/Ge MIS Interface Properties by Low Temperature Conductance Method

Hiroshi Matsubara、Hiroshi Kumagai、Satoshi Sugahara、Mitsuru Takenaka、Shin-ichi Takagi (1.Graduate School of Frontier Science, The University of Tokyo、2.Graduate School of Science and Technology, Tokyo Institute of Technology、3.School of Engineering, The University of Tokyo)

https://doi.org/10.7567/SSDM.2007.A-2-1