[A-2-1] Evaluation of SiO2/GeO2/Ge MIS Interface Properties by Low Temperature Conductance Method

Hiroshi Matsubara, Hiroshi Kumagai, Satoshi Sugahara, Mitsuru Takenaka, Shin-ichi Takagi (1.Graduate School of Frontier Science, The University of Tokyo, 2.Graduate School of Science and Technology, Tokyo Institute of Technology, 3.School of Engineering, The University of Tokyo)

https://doi.org/10.7567/SSDM.2007.A-2-1