[A-2-2] Direct Evidence of GeO Volatilization from GeO2 Films and Impact of Its Suppression on GeO2/Ge MIS Characteristics

Sho Suzuki, Koji Kita, Hideyuki Nomura, Tomonori Nishimura, Akira Toriumi (1.Department of Materials Engineering, School of Engineering, The University of Tokyo)

https://doi.org/10.7567/SSDM.2007.A-2-2