[A-9-5] CMP-less Co-Integration of Tunable Ni-TOSI CMOS for Low Power Digital and Analog Applications

G. Bidal, M. Muller, S. Denorme, D. Aime, M. Rafik, A. Cathignol, G. Ribes, S. Pokrant, P. Gouraud, T. Kormann, G. Chabanne, C. Blanc, S. Bonnetier, D. Barge, C. Laviron, A. Tarnowka, G. Ghibaudo, F. Boeuf, T. Skotnicki (1.NXP Semiconductors, 2.STMicroelectronics, 3.Freescale, 4.CEA-LETI, 5.IMEP)

https://doi.org/10.7567/SSDM.2007.A-9-5