[B-7-1] NMOS Current Enhancement and Layout Dependency Improvement by Using Atomic Layer Deposition SIN Spacer

H. Nagai, K. Ookoshi, H. Morioka, T. Mori, M. Kojima, Y. Takao, M. Kase, K. Hashimoto (1.Fujitsu Ltd.)

https://doi.org/10.7567/SSDM.2007.B-7-1