[B-7-1] NMOS Current Enhancement and Layout Dependency Improvement by Using Atomic Layer Deposition SIN Spacer

H. Nagai、K. Ookoshi、H. Morioka、T. Mori、M. Kojima、Y. Takao、M. Kase、K. Hashimoto (1.Fujitsu Ltd.)

https://doi.org/10.7567/SSDM.2007.B-7-1