The Japan Society of Applied Physics

[B-8-2] Study of Parasitic Resistance Behavior and Its Extraction Method on Deeply Scaled MOSFETs

H. Tsujii、A. Hokazono、M. Fujiwara、S. Kawanaka、A. Azuma、N. Aoki、Y. Toyoshima (1.Center for Semiconductor Research and Development, Toshiba Corporation Semiconductor Company)

https://doi.org/10.7567/SSDM.2007.B-8-2