The Japan Society of Applied Physics

[B-8-3] Two-step Inverse Modeling for Estimation of Channel Impurity Pile-up

Toshiharu Nagumo, Kiyoshi Takeuchi, Yutaka Akiyama, Masami Hane (1.Device Platforms Research Laboratories, NEC Corporation, 2.Advanced Device Development Division, NEC Electronics Corporation)

https://doi.org/10.7567/SSDM.2007.B-8-3