The Japan Society of Applied Physics

[B-9-2] Additivity between sSOI- and CESL-induced nMOSFETs Performance Boosts

F. Andrieu, F. Allain, C. Buj-Dufournet, O. Faynot, F. Rochette, M. Casse, V. Delaye, F. Aussenac, L. Tosti, P. Maury, L. Vandroux, N. Daval, I. Cayrefourcq, S. Deleonibus (1.CEA-LETI MINATEC, 2.SOITEC, Parc technologique des Fontaines)

https://doi.org/10.7567/SSDM.2007.B-9-2