Impact of Gradual Source/Drain Impurity Profiles on Performance of Germanium Channel Double-Gated pMISFETs

Toyoji Yamamoto; Masatomi Harada; Noriyuki Taoka; Yoshimi Yamashita; Naoharu Sugiyama; Shin-ichi Takagi

doi:https://doi.org/10.7567/SSDM.2007.B-9-4

2007 International Conference on Solid State Devices and Materials

Sep 18, 2007 - Sep 21, 2007
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[B-9-4] Impact of Gradual Source/Drain Impurity Profiles on Performance of Germanium Channel Double-Gated pMISFETs

Toyoji Yamamoto, Masatomi Harada, Noriyuki Taoka, Yoshimi Yamashita, Naoharu Sugiyama, Shin-ichi Takagi (1.MIRAI-ASET, 2.MIRAI-AIST, 3.The University of Tokyo)

https://doi.org/10.7567/SSDM.2007.B-9-4

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