Impact of Gradual Source/Drain Impurity Profiles on Performance of Germanium Channel Double-Gated pMISFETs

Toyoji Yamamoto; Masatomi Harada; Noriyuki Taoka; Yoshimi Yamashita; Naoharu Sugiyama; Shin-ichi Takagi

doi:https://doi.org/10.7567/SSDM.2007.B-9-4

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[B-9-4] Impact of Gradual Source/Drain Impurity Profiles on Performance of Germanium Channel Double-Gated pMISFETs

Toyoji Yamamoto、Masatomi Harada、Noriyuki Taoka、Yoshimi Yamashita、Naoharu Sugiyama、Shin-ichi Takagi (1.MIRAI-ASET、2.MIRAI-AIST、3.The University of Tokyo)

https://doi.org/10.7567/SSDM.2007.B-9-4

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