Carbon Nanotube Vias Fabricated by Remote Plasma-Enhanced Chemical Vapor Deposition

Masayuki Katagiri; Naoshi Sakuma; Mariko Suzuki; Tadashi Sakai; Shintaro Sato; Takashi Hyakushima; Mizuhisa Nihei; Yuji Awano

doi:https://doi.org/10.7567/SSDM.2007.C-1-3

2007 International Conference on Solid State Devices and Materials

Sep 18, 2007 - Sep 21, 2007
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[C-1-3] Carbon Nanotube Vias Fabricated by Remote Plasma-Enhanced Chemical Vapor Deposition

Masayuki Katagiri, Naoshi Sakuma, Mariko Suzuki, Tadashi Sakai, Shintaro Sato, Takashi Hyakushima, Mizuhisa Nihei, Yuji Awano (1.MIRAI-Selete (Semiconductor Leading Edge Technologies, Inc.))

https://doi.org/10.7567/SSDM.2007.C-1-3

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