The Japan Society of Applied Physics

[C-1-3] Carbon Nanotube Vias Fabricated by Remote Plasma-Enhanced Chemical Vapor Deposition

Masayuki Katagiri, Naoshi Sakuma, Mariko Suzuki, Tadashi Sakai, Shintaro Sato, Takashi Hyakushima, Mizuhisa Nihei, Yuji Awano (1.MIRAI-Selete (Semiconductor Leading Edge Technologies, Inc.))

https://doi.org/10.7567/SSDM.2007.C-1-3