[C-1-3] Carbon Nanotube Vias Fabricated by Remote Plasma-Enhanced Chemical Vapor Deposition

Masayuki Katagiri、Naoshi Sakuma、Mariko Suzuki、Tadashi Sakai、Shintaro Sato、Takashi Hyakushima、Mizuhisa Nihei、Yuji Awano (1.MIRAI-Selete (Semiconductor Leading Edge Technologies, Inc.))

https://doi.org/10.7567/SSDM.2007.C-1-3