The Japan Society of Applied Physics

[C-7-2] Fully Analytical Modeling of Cu Interconnects Up to 110 GHz

Jun-De Jin, Shawn S. H. Hsu, Tzu-Jin Yeh, Ming-Ta Yang, Sally Liu (1.Dept. of Electrical Engineering and Institute of Electronics Engineering, National Tsing Hua University, 2.Taiwan Semiconductor Manufacturing Company)

https://doi.org/10.7567/SSDM.2007.C-7-2