The Japan Society of Applied Physics

[C-7-2] Fully Analytical Modeling of Cu Interconnects Up to 110 GHz

Jun-De Jin、Shawn S. H. Hsu、Tzu-Jin Yeh、Ming-Ta Yang、Sally Liu (1.Dept. of Electrical Engineering and Institute of Electronics Engineering, National Tsing Hua University、2.Taiwan Semiconductor Manufacturing Company)

https://doi.org/10.7567/SSDM.2007.C-7-2