[E-3-1] LSI on-chip optical interconnection with Si nano-photonics

Junichi Fujikata、Kenichi Nishi、Akiko Gomyo、Jun Ushida、Tsutomu Ishi、Hiroaki Yukawa、Daisuke Okamoto、Masafumi Nakada、Takanori Shimizu、Masao Kinoshita、Koichi Nose、Masayuki Mizuno、Tai Tchuchizawa、Toshifumi Watanabe、Koji Yamada、Seiichi Itabashi、Keishi Ohashi (1.MIRAI-Selete、2.NTT Microsystem Integration Labs.)

https://doi.org/10.7567/SSDM.2007.E-3-1