[E-3-1] LSI on-chip optical interconnection with Si nano-photonics

Junichi Fujikata, Kenichi Nishi, Akiko Gomyo, Jun Ushida, Tsutomu Ishi, Hiroaki Yukawa, Daisuke Okamoto, Masafumi Nakada, Takanori Shimizu, Masao Kinoshita, Koichi Nose, Masayuki Mizuno, Tai Tchuchizawa, Toshifumi Watanabe, Koji Yamada, Seiichi Itabashi, Keishi Ohashi (1.MIRAI-Selete, 2.NTT Microsystem Integration Labs.)

https://doi.org/10.7567/SSDM.2007.E-3-1