[E-7-5] Passive Optical Alignment with High Accuracy for Low-Loss Optical Interposer

M. Fujiwara、S. Terada、Y. Shirato、H. Owari、K. Watanabe、M. Matsuyama、K. Takahama、T. Mori、K. Miyao、K. Choki、T. Fukushima、T. Tanaka、M. Koyanagi (1.Sumitomo Bakelite Co., Ltd、2.Dept. of Bioengineering and Robotics, Graduate School of Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.2007.E-7-5