The Japan Society of Applied Physics

[E-9-10L] Silicon Electro-Optic Modulator Fabricated on Silicon Substrate Utilizing the Three-Terminal Transistor Waveguide Structure

Ricky W. Chuang, Zhen-Liang Liao, Mao-Teng Hsu, Jia-Ching Liao, Chih-Chieh Cheng (1.Institute of Microelectronics, Department of Electrical Engineering, and Advanced Optoelectronic Technology Center (AOTC), National Cheng Kung University)

https://doi.org/10.7567/SSDM.2007.E-9-10L