[F-5-3] A Novel Process-Compatible Floating Channel Crystallization Technique to Fabricate High-Performance Poly-Si TFTs

Chia-Wen Chang, Jam-Wem Lee, Che-Lun Chang, Tan-Fu Lei (1.Institute of Electronics, National Chiao-Tung University, 2.Taiwan Semiconductor Manufacturing Company)

https://doi.org/10.7567/SSDM.2007.F-5-3