A Novel Process-Compatible Floating Channel Crystallization Technique to Fabricate High-Performance Poly-Si TFTs

Chia-Wen Chang; Jam-Wem Lee; Che-Lun Chang; Tan-Fu Lei

doi:https://doi.org/10.7567/SSDM.2007.F-5-3

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[F-5-3] A Novel Process-Compatible Floating Channel Crystallization Technique to Fabricate High-Performance Poly-Si TFTs

Chia-Wen Chang、Jam-Wem Lee、Che-Lun Chang、Tan-Fu Lei (1.Institute of Electronics, National Chiao-Tung University、2.Taiwan Semiconductor Manufacturing Company)

https://doi.org/10.7567/SSDM.2007.F-5-3

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