[F-6-5L] Oriented Growth of Location-Controlled Si Crystal Grains Using Ni Nano-Imprint and Excimer Laser Annealing

Gou Nakagawa, Tanemasa Asano (1.Granduate School of Information Science and Electrical Engineering, Kyushu University)

https://doi.org/10.7567/SSDM.2007.F-6-5L