[F-9-4] Characteristics of Pure Ge3N4 Dielectric Layers Formed by High-Density Plasma Nitridation

Katsuhiro Kutsuki、Gaku Okamoto、Takuji Hosoi、Takayoshi Shimura、Kiyoshi Yasutake、Heiji Watanabe (1.Graduate School of Engineering, Osaka University)

https://doi.org/10.7567/SSDM.2007.F-9-4