[G-7-3] Improved electrical characteristics of Pt/Gd2O3/GaAs MOS capacitors with surface preparation procedures

Chao-Ching Cheng, Chao-Hsin Chien, Guang-Li Luo, Chih-Kuo Tseng, Hsin-Che Chiang, Chun-Hui Yang, Chun-Yen Chang (1.Institute of Electronics, National Chiao-Tung University, 2.National Nano Device Laboratory)

https://doi.org/10.7567/SSDM.2007.G-7-3